Lead frame and production process thereof and production process of thermally conductive substrate

ABSTRACT

A thermally conductive substrate includes a thermally conductive resin sheet member attached to a lead frame. The lead frame comprises a thermally conductive resin sheet member and it is integrated with the thermally conductive resin sheet member on the lead frame. The thermally conductive resin sheet member is formed from a thermosetting resin mixture which comprises 70 to 90 parts by weight of an inorganic filler and 5 to 30 parts by weight of a thermosetting resin composition including a thermosetting resin, and the thermosetting resin is in a semi-cured state.

This application is a divisional application of Ser. No. 10/026,522,filed Dec. 27, 2001, now U.S. Pat. No. 6,870,244, currently pending.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims priorities under 35 U.S.C. §119 toJapanese Patent Application No. 2000-397650 filed on Dec. 27, 2000entitled “Thermally conductive resin sheet attaching lead frame andproduction process thereof and production process of thermallyconductive substrate using the same”, and Japanese Patent ApplicationNo. 2000-397651 filed on Dec. 27, 2000 entitled “Sheet amount controlmeans and production process of substrate.” The contents of thoseapplications which are relevant to the inventions of the presentapplication are incorporated herein by the references thereto in theirentireties.

BACKGROUND OF THE INVENTION

The present invention relates to a circuit board with which heatdissipation is improved by means of a mixture of a resin and aninorganic filler. Particularly, the present invention relates to a resinsubstrate having a high heat dissipation (i.e. a thermally conductivesubstrate) which is used for mounting power electronics devices. Moreparticularly, the present invention relates to a thermally conductivesubstrate and a lead frame which comprises a thermally conductive resinsheet member and which is used for the production of the thermallyconductive substrate, and production processes of such substrate andsuch lead frame.

RELATED ART

Recently, as high performance and miniaturization of an electronicapparatus have been required, a high density and high performancesemiconductor device has been sought. Consequently, a circuit board formounting such a device has also been required to be small and of a highdensity. As a result, it has been important to design a circuit boardwhile considering the heat dissipation (or heat radiation) property.

As opposed to using a conventional printed circuit board made of aglass-epoxy resin, providing a metal base substrate is known as atechnique for improving the heat dissipation property of the circuitboard. In particular, a metal plate of, for example, aluminum is used,and a circuit pattern is placed on an intermediate insulation on oneside of the metal plate. Moreover, when higher thermal conductivity isrequired, a substrate is used wherein a copper plate is directly bondedto a ceramic substrate made of, for example, alumina or aluminumnitride.

For an application requiring relatively small electric power, the metalbase substrate is generally used. In this case, in order to improve thethermal conduction, the insulation must be thin. However, there occurproblems in that a noise effect occurs between the metal base substratesand a break down voltage is low. Further, there is a problem in that acost of the ceramic substrate is expensive.

It is difficult for the metal base substrate and the ceramic substrateto satisfy both the performance and the cost requirements as describedabove. A thermally conductive module made by injection molding has beensuggested wherein a thermoplastic resin composition containing aninorganic filler is integrated with a lead frame as an electrode (seefor example Japanese Patent Kokai Publication Nos. 9-298344 and9-321395).

Such a thermally conductive module made by injection molding has anexcellent mechanical strength in comparison with the ceramic substrate.However, it is difficult to load the thermoplastic resin with theinorganic filler in a large content thereof so as to provide the resinwith the heat dissipation property, which leads to a bad heatdissipation property. This is because the large content of the fillerresults in rapid viscosity increase of the thermoplastic resin when itis mixed with the filler at a high temperature, so that it also becomesimpossible to carry out not only kneading the resin but also theinjection molding. Moreover, the loaded filler serves as an abrasive toabrade a metal mold, which makes it difficult to repeat the molding manytimes. Consequently, there is a problem in that a content of the filleris limited, so that only lower thermal conductivity can be obtained ascompared with the thermal conductivity of the ceramic substrate.

In order to solve the above problems, Japanese Patent Kokai PublicationNo. 10-173097 discloses a thermally conductive substrate in which a leadframe and a metal heat dissipation plate are arranged to opposed to eachother. A production process of substrate producing a thermallyconductive resin sheet member which is loaded with an inorganic fillerat a high content by the formation of a sheet member from a mixture of athermosetting resin which is flexible in its semi-cured (orsemi-hardened) state and the inorganic filler which provides betterthermal conductivity (which mixture is also referred to as a“thermosetting resin mixture”), and stacking a lead frame as anelectrode and a heat dissipation metal plate so that they sandwich thesheet member, followed by thermally pressing them so as to fill the leadframe up to its surface with the thermally conductive resin sheet memberwhile it is cured. The lead frame, the thermally conductive resin sheetmember and the heat dissipation metal plate are integrated together. Itis noted that the contents of the Patent Publication are incorporatedherein by the reference thereto in their entireties.

When the thermally conductive substrate is produced using the abovedescribed process, the thermosetting resin mixture may overflow onto aperiphery of an exposed surface of the heat dissipation metal plate, anda periphery of an exposed surface of the lead frame and curing of suchthermosetting resin mixture forms resin burrs and surface stains. Theburrs and the surface stains cause an inconvenience in soldering uponmounting parts onto the thermally conductive substrate and also they arenot preferable from a viewpoint of appearance of the thermallyconductive substrate. Thus, an additional step is required to remove theburrs and the stains.

When the thermally conductive resin sheet member is produced using theabove described process, there occurs a fluctuation of the thermosettingresin mixture itself and various changes of steps, so that it is noteasy to stably produce the thermally conductive resin sheet members eachhaving a predetermined thickness (and thus its predetermined volume).

Particularly, when the thermally conductive resin sheet member isexcessively thick, and thus too large, an amount of the thermosettingresin mixture which overflows onto the periphery of the lead framebecomes larger, so that the burrs and the stains formed on the leadframe increase. Also, when the volume of the thermally conductive resinsheet member is fluctuated, a thickness of the thermally conductivesubstrate finally produced is fluctuated so that no stable supply of thesubstrate may become possible. That is, in order to stably produce thethermally conductive substrate, it is necessary to produce anappropriate thermally conductive resin sheet member stably.

On the other hand, when the thermally conductive substrate is producedusing the above described process, the thermally conductive resin sheetmember made from the thermosetting resin which is flexible in itssemi-hardened state does not necessarily have a sufficient mechanicalstrength, so that there is a problem in that handling of the thermallyconductive resin sheet member is not easy. The thermally conductiveresin sheet member is controlled to have a long gel time (for example,longer than four minutes) under the consideration of stable storage overan extended period. However, when a lead frame is integrated with suchthermally conductive resin sheet member by curing the thermallyconductive resin sheet member, there occurs problems not only of theformation of the resin burrs as described above but also of an extendedcycle period for the integration due to the long curing time.

SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provideimprovement as to at least one of the various problems as describedabove as compared with what has been hitherto.

The present inventors have found that a thermally conductive resin sheetmember reinforced by a lead frame by integrating the lead framebeforehand with the thermally conductive resin sheet member in which athermosetting resin contained therein is in a semi-cured state, handlingof the thermally conductive resin sheet member is improved. Theinventors have also found that a thermally conductive substrate can beproduced in an improved state as to at least one of the various problemsdescribed above when compared with the prior art by stacking a heatdissipation metal plate and the thermally conductive resin sheet memberthus integrated with the lead frame followed by thermally pressing them.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically shows a cross-sectional view of one embodiment of athermally conductive resin sheet member attached to a lead frameaccording to the present invention;

FIGS. 2( a) to 2(c) schematically show cross-sectional views of steps ofone embodiment of a production process of a lead frame attached to athermally conductive resin sheet member according to the presentinvention;

FIGS. 3( a) to 3(d) schematically show cross-sectional views and topviews of steps of one embodiment of a production process of a thermallyconductive resin sheet member;

FIGS. 4( a) to 4(d) schematically show cross-sectional views and topviews of steps of another embodiment of a production process of athermally conductive resin sheet member;

FIGS. 5( a) to 5(d) schematically show cross-sectional views of steps ofanother embodiment of a production process of a lead frame attached to athermally conductive resin sheet member according to the presentinvention;

FIGS. 6( a) to 6(d) schematically show cross-sectional views and topviews of steps of a further embodiment of a production process of a leadframe attached to a thermally conductive resin sheet member according tothe present invention;

FIGS. 7( a) to 7(c) schematically show cross-sectional views of steps ofone embodiment of a production process of a thermally conductivesubstrate according to the present invention;

FIGS. 8( a) to 8(e) schematically show cross-sectional views of steps ofanother embodiment of a production process of a thermally conductivesubstrate according to the present invention; and

FIG. 9 is a graph which shows a relationship between a thickness of athermally conductive substrate produced in one example of the presentinvention and a thickness of a spacer used for such production.

In the drawings, the reference numbers indicate the following members:

101, 201, 301, 401, 501, 601, 701 and 801 . . . thermally conductiveresin sheet member;

102, 202, 502, 602, 702 and 802 . . . lead frame;

302, 402 and 503 . . . plate pair spaced apart a predetermined distance;

303 and 403 . . . thermally conductive resin sheet member having apredetermined thickness;

304 and 404 . . . thermally conductive resin sheet member having acontrolled mass per unit area;

600 . . . independent terminal of a lead frame;

603 . . . through opening (or through hole);

604 . . . pin;

605 . . . die;

610 . . . outer frame portion;

612 . . . common terminal;

700 . . . thermally conductive resin sheet member attached to a leadframe; and

703 and 803 . . . heat dissipation metal plate;

DESCRIPTION OF THE INVENTION

In the first aspect, the present invention provides a thermallyconductive resin sheet member attached to a lead frame. The lead framecomprises a thermally conductive resin sheet member and it is integratedwith the thermally conductive resin sheet member on the lead frame. Thethermally conductive resin sheet member is formed from a thermosettingresin mixture which comprises 70 to 90 parts by weight of an inorganicfiller and 5 to 30 parts by weight of a thermosetting resin compositioncomprising a thermosetting resin, and the thermosetting resin is in asemi-cured state.

When the amount of the inorganic filler in the thermosetting resinmixture is less than the above specific range, a substrate which isproduced using the thermally conductive resin sheet member attached tothe lead frame may be insufficient as to its heat dissipation. On theother hand, when such amount is larger than the above specific range, anadhesion property of the thermally conductive resin sheet member may bedegraded, so that a sufficient substrate cannot be produced. It is notedthat from a viewpoint of a further improvement of the thermallyconductive resin sheet member in its thermal conductivity and itsadhesion property, a particularly preferable weight ratio of theinorganic filler to the thermosetting resin composition is 85–95 to15–5.

As to such thermally conductive resin sheet member attached to the leadframe, since the thermally conductive resin sheet member is integratedwith the lead frame, the thermally conductive resin sheet member isreinforced so that cracks, breakage and the like thereof are unlikely tooccur, which improves handling of the thermally conductive resin sheetmember. It is noted that the term “integrate(d)” as used herein isreadily understood by those skilled in the art, and means that thethermally conductive resin sheet member becomes bonded (especially anadhesion state sufficient for the application of the thermallyconductive substrate to be produced) to another element such as a leadframe or a heat dissipation metal plate which will be described belowdue to properties inherent in the thermally conductive resin sheetmember, such as properties when it is heated (including being heated forprogressing the curing and being heated while suppressing the curing)and/or pressurized (or pressed) and properties when it is optionallycooled thereafter.

In the thermally conductive resin sheet member attaches to a lead frameaccording to the present invention, the thermally conductive resin sheetmember is made from the thermosetting resin mixture, has an electricallyinsulating property and is able to function as an insulation layer. Thethermosetting resin mixture is composed of the thermally conductiveresin composition and the inorganic filler, and it includes a solvent(or diluent or dispersing agent) if necessary so as to adjust aviscosity of the thermosetting resin mixture. The thermally conductiveresin composition includes the thermosetting resin as its maincomponent.

As such a thermosetting resin, a thermosetting resin which is usuallyused for an electronic substrate and especially for electricalinsulation application of the electronic substrate is preferable. Atleast one selected from a bisphenol A epoxy resin, a bisphenol F epoxyresin and a liquid phenol resin is more preferable, and also anycombination thereof may be used. Using those resins is particularlypreferable due to their excellent electric properties (in particular, anelectrically insulating property) and mechanical properties (inparticular, a mechanical strength).

In addition, the thermally conductive resin composition may furtherinclude other component(s). As such other component(s), an curing (orhardening) agent and/or a curing (or hardening) accelerator ispreferable. As the curing agent, a bisphenol A novolac resin may beused, and as the hardening accelerator, an imidazole may be used.Additionally, the thermally conductive resin composition may furtherinclude an additive such as a coupling agent, a dispersing agent, acoloring agent and a release agent. These additives are not particularlylimited, and they are optionally selected. As the coupling agent, anepoxy-silane based coupling agent, an amino-silane based coupling agentand a titanate based coupling agent may be used. As the dispersingagent, a phosphate may be used. As the coloring agent, carbon black andchromium oxide may be used. As the release agent, a silicone resin maybe used.

The inorganic filler which is contained in the thermosetting resinmixture (namely, thermally conductive resin composition+inorganicfiller+solvent (when required)) is not particularly limited as long asit provides the thermal conductivity with the thermally conductive resinsheet member to be produced. The filler is preferably at least oneselected from Al₂O₃, MgO, BN and AlN, and also any combination thereofmay be used. These fillers are particularly excellent in their thermalconduction, which makes it possible to produce a substrate having alarge thermal radiation property. In particular, when Al₂O₃ is used,mixing with the thermally conductive resin composition becomes easy.Further, when AlN is used, the thermal radiation property of the finallyproduced thermally conductive substrate is particularly large, which ispreferable. A form of the filler is not particularly limited, and afiller in the form of powder, granules, and/or fibers may be used. Whenthe inorganic filler is in the form of a powder or granules, a diameterof each filler particle is preferably in the range between 0.1 μm and100 μm. When the diameter is excessively larger or too smaller,compatibility of the inorganic filler may be insufficient.

In the thermally conductive resin sheet member attached to a lead frameaccording to the present invention, the thermosetting resin contained inthe thermally conductive resin sheet member is in the semi-cured (orsemi-hardened) state or in a partly cured state. Such a state is alsoreferred to as a so-called B-stage. In the lead frame according to thepresent invention, such semi-cured state is preferably such that a geltime of the thermally conductive resin sheet member at a temperature of155° C. is in the range between 20 seconds and 120 seconds. The gel timeis more preferably in the range between 40 seconds and 100 seconds, andparticularly in the range between 50 seconds and 90 seconds. When thegel time is too short, an insufficient adhesion state with a heatdissipation metal plate may be obtained in a later step of thermallypressing for the integration with the heat dissipation metal plate. Whenthe gel time is too long, “Takt” (German language, a production cycleperiod) for the production of the thermally conductive substrateintegrated with the heat dissipation metal plate becomes long and thethermosetting resin mixture may exude over the peripheries of theexposed surfaces of the thermally conductive substrate and the leadframe and cure so that the resin burrs, and so that stains and the likeare formed.

The gel time in the present specification means a time period between atime at which the thermally conductive resin sheet member which containsthe thermosetting resin in the semi-cured state reaches a predeterminedtemperature (usually by means of being heated) and a time at which itsolidifies after rapidly loosing its fluidity, and it is measured as atime period at a specific temperature (herein 155° C. is used).

Concretely, the gel time used in the present specification means a valuewhich is measured by the following method: A tablet shaped sample havinga diameter of 25 mm (usually 8 grams) is cut out of the thermallyconductive resin sheet member in the semi-cured state (such a sample maybe obtained from the thermally conductive resin sheet member which hasbeen integrated with the lead frame because no cure proceeds upon theintegration with the lead frame). Then, using a Curelastometer(manufactured by JSR, Model Vps), the sample is sandwiched by an upperplate and a lower plate both of which are heated to a temperature of155° C., sinusoidal oscillation is applied to the sample, whichgenerates a torque, and the torque is measured. The torque increases asthe cure of the thermosetting resin contained in the thermallyconductive sheet member proceeds. A time period (from just aftersandwiching) to the time at which the torque exceeds 0.1 kgf/cm² ismeasured as the gel time at a temperature of 155° C. A basic principleof such method to measure the gel time is generally known.

Further, in the thermally conductive resin sheet member attaching leadframe according to the present invention, the thermally conductive resinsheet member preferably has a viscosity in the range between 10² Pa.sand 10⁵ Pa.s, and more preferably between 10³ Pa.s and 10⁵ Pa.s. Aviscosity below 10² Pa.s leads to excessive deformation upon theproduction of the thermally conductive substrate so that the deformationof the resin burrs and the surface stains may not be sufficientlysuppressed on the exposed surface of the lead frame. On the other hand,a viscosity above 10⁵ Pa.s does not provide a sufficient flexibility ofthe thermally conductive resin sheet member, so that the production ofthe thermally conductive substrate may be difficult.

It is noted that the viscosity of the thermally conductive resin sheetmember is measured according to the following method. A “cone and plate”type elasto-viscosity measurement apparatus (manufactured by RhelogyCo., Ltd., dynamic elasto-viscosity measurement apparatus MR-500) isused for the measurement. The sheet member is processed into apredetermined size and located between a plate and a cone having adiameter of 17.97 mm and a cone angle of 1.15 degrees. Sinusoidaloscillation is applied to the sample in a twisting direction, and adifference in the phases of torque which is generated by the sinusoidaloscillation is calculated, whereby the viscosity is calculated. As tothe thermally conductive resin sheet member according to the presentinvention, the viscosity was obtained at a temperature of 25° C. underconditions that the sinusoidal oscillation was a sine wave with afrequency of 1 Hz, a strain was 0.1 deg., and a load was 500 g.

In the thermally conductive resin sheet member attached to the leadframe according to the present invention, since the thermally conductiveresin sheet member is integrated with the lead frame while thethermosetting resin is in the semi-cured state, the production cycleperiod becomes shorter upon the production of the thermally conductivesubstrate compared with the production wherein an uncured thermosettingresin is used, and the lead frame and the heat dissipation metal plateare integrated with the resin. In addition, since the integration of thelead frame with the thermally conductive resin sheet member whichcontains the thermosetting resin in the semi-cured stage is carried outunder a condition which does not provide substantial progress of thecuring of the thermosetting resin as explained below, the resin burrsand stains are not formed on the exposed surface of the integrated leadframe.

In one embodiment of the thermally conductive resin sheet memberattached to the lead frame according to the present invention, a portionof the lead frame is integrated with the thermally conductive resinsheet member. For example, the thermally conductive resin sheet memberis not present under an outer periphery portion of the lead frame, andthus the lead frame except such outer periphery portion is integratedwith the thermally conductive resin sheet member. In such embodiment,the lead frame is desirably such that through common terminal(s)(preferably common terminal(s) extending from the thermally conductiveresin sheet member toward the outside thereof) which are connected to anouter frame portion of the lead frame, and the other terminals of thelead frame are electrically connected to the outer frame portion. Thisprevents any terminal of the lead frame from falling down from thethermally conductive resin sheet member attached to the lead frame sothat handling of the thermally conductive resin sheet member attached tothe lead frame is improved.

In one preferable embodiment of the thermally conductive resin sheetmember attached to the lead frame according to the present invention, aportion of the lead frame is integrated with the thermally conductiveresin sheet member, and at least one circuit pattern or a terminal whichis electrically independent of the integrated lead frame is present (onthe same side as the lead frame) while integrated with the thermallyconductive resin sheet member. This keeps the independent circuitpattern or terminal in an isolated island-like form on the thermallyconductive resin sheet member while being electrically independent ofthe lead frame, so that such isolated circuit pattern or terminal doesnot fall down from the thermally conductive resin sheet member attachedto the lead frame, which improves handling of the thermally conductiveresin sheet member attached to the lead frame.

As described below in detail, the thermally conductive resin sheetmember attached to the lead frame as described above is produced bystacking the lead frame and the thermally conductive resin sheet memberof which thermosetting resin contained therein is in the semi-curedstate, and pressurizing (or pressing) and (when required) heating themat a temperature at which the thermosetting resin of the thermosettingresin sheet member does not cure (therefore, curing does not proceed) sothat they are integrated. Such lead frame preferably forms a surfacesuch that the lead frame flushes with the thermally conductive resinsheet member attached to the lead frame. That is, the lead frame hascircuit patterns, and it has at least one through-opening, and thethrough-opening is preferably filled with the thermally conductive resinsheet member up to the exposed surface of the lead frame.

It is noted that the lead frame to be used is not particularly limitedand it may be one which is usually used for electronic circuit boards. Amaterial for the lead frame may be any one which has a large electricconductivity and also which is readily worked. For example, it may becopper, iron, nickel, aluminum, silver, or various alloys which containthose materials as main components. A wiring pattern is formed in thelead frame, and a known chemically etching method, a known stamping outmethod using a die, or a known stamping out method using punching may beused for the formation of the wiring pattern. The lead frame may beplated so as to prevent its surface oxidation and also to improve itssurface solder wetting property. As to species of the plating, tin,nickel, lead, silver, gold, palladium, chromium and alloys includingthose elements as main components may be used. Further, it is preferableto roughen a surface to be bonded of the lead frame so as to improve itsadhesion with the thermally conductive resin sheet member. There is noparticular limitation as to a method for roughening the surface, andsand blasting, abrasion and chemical etching may be used.

As described above, when the step of integrating the lead frame with thethermally conductive resin sheet member of which thermosetting resin isin the semi-cured state is carried out under the condition (especiallythe temperature) which provides substantially no progress of curing ofthe thermosetting resin contained in the thermally conductive resinsheet member, exudation of the thermosetting resin mixture onto theexposed surface of the lead frame is suppressed. The produced thermallyconductive resin sheet member attaching lead frame may be then cooled asrequired (for example cooled to the room temperature), and it can bestored as it is.

Further, when a heat dissipation metal plate is stacked on the thermallyconductive resin sheet member which has been thus integrated with thelead frame, followed by heating them so that curing proceeds and then byheating with pressing so that the thermally conductive substrate isproduced, overflows of the thermosetting resin mixture onto the exposedsurfaces of the lead frame and the heat dissipation metal plate aresuppressed. Therefore, the formation of the stains and the resin burrson the exposed surfaces is prevented.

Thus, in the second aspect, the present invention provides a process forthe production of a thermally conductive resin sheet member attached toa lead frame which comprises a lead frame which is located on and whichis integrated with a thermally conductive sheet member formed from athermally conductive resin mixture comprising an in organic filler and athermosetting resin composition in a semi-cured state.

The process comprises:

(a) obtaining the thermally conductive resin sheet member from thethermally conductive resin mixture comprising the inorganic filer andthe thermally conductive resin composition which comprises thethermosetting resin;

(b) thermally treating the thermally conductive resin sheet member sothat it has a predetermined gel time; and

(c) placing the lead frame on the thermally conductive resin sheetmember and pressing them toward each other under a temperature at whichcuring of the thermally conductive resin does not proceed so as tointegrate the lead frame and the sheet member.

It is noted that the above explanations as to the thermally conductiveresin sheet member attached to the lead frame according to the presentinvention (for example, the details as to the thermosetting resin, theinorganic filler, the gel time, the lead frame and so on) andexplanations shown below are also applicable to various processesaccording to the present invention which will be explained below as faras there occurs no particular inconvenience.

In the process of the production of the lead frame according to thepresent invention, step (a) may be carried out by blending thethermosetting resin, the inorganic filler and the other one or morecomponents when necessary, and further mixing them with a solvent (forexample, methyl ethyl ketone (MEK), toluene, iso-propanol or the like)so as to obtain the thermosetting resin mixture of which viscosity isadjusted. The thus-obtained thermosetting resin mixture is then appliedonto a substrate followed by drying for the removal of the solvent sothat a sheet like member is obtained. As far as the sheet like member isobtained, the thermosetting resin mixture may be processed by anothermethod such as extrusion. Such a step is preferably carried out underthe condition which provides substantially no cure progress of thethermosetting resin. In this case, the thermally conductive resin sheetmember has a long gel time, and it can be stored for a long time.However, in another embodiment, the cure of the thermosetting resin mayproceed in step (a) as far as the gel time can be adjusted in step (b).For example, even though step (a) is carried out at a temperature atwhich the cure proceeds, the gel time adjustment in step (b) can beachieved if a time for step (a) is short. The cure of the thermosettingresin is control led usually by temperature control, and thereforewhether or not the cure proceeds in step (a) is determined by a thermalcondition (that is, a temperature condition to which the thermallyconductive resin composition and the inorganic filler are subjected toduring the production of the sheet member). The temperature conditionunder which the cure proceeds depends on the thermosetting resin to beused, and step (a) is carried out at a temperature usually not higherthan 90° C., preferably not higher than 85° C., and more preferably nothigher than 80° C.

It is noted that the preparation method of the thermosetting resinmixture is not particularly limited as far as it can achieve sufficientmixing of components to be mixed. For example, mixing with a ball mill,mixing with a stirrer, and mixing with a planetary mixer may beexemplified. Also, the application method of the thermosetting resinmixture (i.e. the film (or sheet) formation method from thethermosetting resin mixture) is not particularly limited, and a doctorblade method, a coater method, an extrusion method or the like may beused. In particular, when the thermosetting resin mixture is preparedusing the solvent and applied, the doctor blade method is preferablyused since it is advantageous in that the film formation is easy.

Such application (or film formation) may be carried out onto a releasefilm, in which case handling of the thermally conductive resin sheetmember is improved when it is stored. As the release film, there is noparticular limitation, and a PET (polyethylene terephthalate) film, aPPS (polyphenylene sulfide) film and the like may be used. Also, asurface of the film is preferably treated using a release agent such assilicone.

It is noted that as to the details of step (a), Japanese Patent KokaiPublication No. 10-173097 is referred to above, and its counterpart U.S.Pat. No. 6,060,150 may be referred to, and the contents of these patentdocuments are incorporated herein by the references thereto.

In the production process of the lead frame according to the presentinvention, the thermally conductive resin sheet member which is obtainedin step (a) is thermally treated. The thermally conductive resin sheetmember which is to be thermally treated may either be one which wascooled after step (a) and has been stored as required, or one which hasjust completed step (a) (therefore, it may still be warm). The thermaltreatment in step (b) is a treatment in which the thermally conductiveresin sheet member is subjected to a predetermined time temperaturecondition for a predetermined time period. For example, it may be placedin an atmosphere having the predetermined temperature so that the geltime of the sheet member is adjusted within a range as predetermined.Generally, when the predetermined temperature is higher, thepredetermined time is shorter. In step (b), the cure of thethermosetting resin partly proceeds to reach the predetermined gel time.The thermal treatment is carried out usually at a temperature in a rangebetween 80° C. and 140° C., preferably in the range between 85° C. and130° C., and more preferably in the range between 90° C. and 125° C. Thepredetermined temperature and the predetermined time period whichprovide the predetermined gel time can be properly selected by thoseskilled in the art by measuring the gel times obtained by the thermaltreatments under various temperatures and various time periods dependingon the thermosetting resin to be used. That is, they can be selected bya trial-and-error method. The predetermined gel time is preferably inthe range between 20 seconds and 120 seconds at a temperature of 155° C.as described above. After heating for the predetermined time period instep (b), the thermally conductive resin sheet member is cooled to atemperature at which substantially no cure proceeds (for example to atemperature of not higher than 80° C., preferably not higher than 50°C., and for example to the room temperature), and then the step (c) iscarried out after storing it if necessary.

In the production process of the lead frame according to the presentinvention, the thermally conductive resin sheet member having thepredetermined gel time is integrated with the lead frame by pressurizingthe thermally conductive resin sheet member and the lead frame (namelypressing them to each other) under a condition which does not provideany substantial cure progress of the thermosetting resin of thethermally conductive resin sheet member. Upon such pressurizing, whenthe thermally conductive resin sheet member is at a temperature which isnot so high (for example at the room temperature) so as to have asufficient adhesion property, it may be heated to obtain such adhesionproperty or the lead frame can be placed on the thermally conductiveresin sheet member followed by heating them so as to give such adhesionproperty. Thus, the lead frame is integrated with the thermallyconductive resin sheet member. On the other hand, when the thermallyconductive resin sheet member already has an adhesion property (ortackiness property) which is sufficient for the integration (for examplewhen the thermally conductive resin sheet member is at a relatively hightemperature because it is in a condition of being just after step (b)),no heating is required. It is noted that attention should be paid so asto avoid the cure progress of the thermosetting resin in the step (c).Whether or not the cure proceeds can be easily determined by measuringthe gel time of the thermally conductive resin sheet member after step(c) and comparing it with the gel time adjusted in step (b). If it isdetermined that the cure proceeded, the temperature at which step (c) iscarried out is lowered. In the production process of the lead frameaccording to the present invention, pressing in step (c) is carried outat temperature in the range between 30° C. and 90° C., preferably in therange between 40° C. and 80° C., more preferably in the range between50° C. and 70° C., and for example at a temperature of 65° C., and undera pressure in the range between 1 MPa and 20 MPa, preferably in therange between 3 MPa and 15 MPa, more preferably in the range between 6MPa and 12 MPa, and for example a pressure of 10 MPa for a period in therange between 10 seconds to 200 seconds, preferably in the range between30 seconds to 100 seconds, more preferably in the range between 40seconds to 80 seconds and for example 60 seconds.

The lead frame has at least one through-opening as described above, andstep (c) is preferably carried out so that the thermally conductiveresin sheet member fills the through-opening up to the exposed surfaceof the lead frame. Thus, the exposed surface of the lead frame issubstantially flush with a portion of the thermally conductive resinsheet member which fills the through-opening (namely, they form a singlesurface).

In one preferable embodiment, the production process of the thermallyconductive resin sheet member attached to the lead frame according tothe present invention as described above desirably comprises the step offorming the thermally conductive resin sheet member into a predeterminedshape between steps (b) and (c). The predetermined shape may be selectedby those skilled in the art depending on the application of the finallyobtainable thermally conductive substrate. Concretely, the thermallyconductive resin sheet member is cut into the predetermined shape.Alternatively, the predetermined shape may be obtained by stamping itout of the thermally conductive resin sheet member. Forming thepredetermined shape controls a weight of the thermally conductive resinsheet member to be produced.

In the step of forming the thermally conductive resin sheet member intothe predetermined shape in the above preferable embodiment, thethermally conductive resin sheet member is sandwiched by a pair ofplates, and the plates are allowed to approach each other so as to pressthe thermally conductive resin sheet member such that a predeterminedspacing between the plates is achieved. The thermally conductive resinsheet member has a thickness corresponding to the spacing between theplates and the obtained sheet member is formed into the predeterminedshape. When the thermally conductive resin sheet member is processed asdescribed above, it has a uniform thickness so that an amount (volume orweight) per unit area of the thermally conductive resin sheet memberbecomes constant. As a result, forming (for example, cutting) suchthermally conductive resin sheet member into the predetermined shapecontrols the amount of the thermosetting resin mixture (namely, amixture of the thermally conductive resin composition and the inorganicfiller) which constitutes one piece of the formed thermally conductiveresin sheet member. Thus, the volume of the thermally conductive resinsheet member which is to be integrated with the lead frame in the nextstep can be made constant.

In another preferable embodiment, the production process of thethermally conductive resin sheet member attached to the lead frameaccording to the present invention as described above removes a portionof the lead frame which has been integrated with the thermallyconductive resin sheet member after step (c). The portion of the leadframe to be removed is preferably one that has been integrated with thethermally conductive resin sheet member, and the removal of such portioncan form a portion of the lead frame which has been integrated with thelead frame into a circuit pattern or a terminal which is electricallyindependent of the remaining portions of the lead frame. In this case,the electrically independent circuit pattern or terminal is supported bythe thermally conductive resin sheet member, so that it is possible toproduce a thermally conductive resin sheet member attached to the leadframe which includes the rest portions as a lead frame without dropoutof such electrically independent circuit pattern or terminal.

In one embodiment, the production process of the thermally conductiveresin sheet member attached to the lead frame of the second aspectaccording to the present invention comprises step (c) in which thethermally conductive resin sheet member and the lead frame aresandwiched between two plates, and the plates are allowed to approacheach other so that a spacing between them becomes a predeterminedspacing. Thus, the thermally conductive resin sheet member and the leadframe are pressed to each other so that the thermally conductive resinsheet member which is integrated with the lead frame and which has apredetermined thickness is obtained. The process further comprises step(d) in which the thermally conductive resin sheet member which has beenintegrated with the lead frame is formed into a predetermined shape.This embodiment is effective in that the adjustment of the thickness ofthe thermally conductive resin sheet member as well as the integrationof the thermally conductive resin sheet member with the lead frame canbe carried out simultaneously.

The lead frame which is produced by the production process of thethermally conductive resin sheet member attached to the lead frame asdescribed above can be used for the production of the thermallyconductive substrate in combination with the heat dissipation metalplate. Thus, in the third aspect of the present invention, there isprovided a process of producing a thermally conductive substratecomprising a thermally conductive resin sheet member, a lead frame and aheat dissipation metal plate which comprises the steps of:

(1) placing the heat dissipation metal plate on the thermally conductiveresin sheet member attached to the lead frame which is producedaccording to the second aspect of the present invention so that the leadframe and the metal heat dissipation metal plate are opposed through thethermally conductive resin sheet member;

(2) thermally treating the thermally conductive resin sheet memberattached to the lead frame and the heat dissipation metal plate withoutpressing them to each other for a predetermined period at a temperaturenot lower than a temperature at which cure of the thermosetting resinproceeds; and

(3) thereafter, pressing the lead frame and the heat dissipation metalplate to each other while continuing the thermal treatment so that thecure of the thermosetting resin further proceeds while the heatdissipation metal plate is integrated with the thermally conductiveresin sheet member attached to the lead frame.

After the production of the thermally conductive resin sheet memberattached to the lead frame in the above production process of thethermally conductive substrate, when a plurality of the thermallyconductive resin sheet members (preferably many thermally conductiveresin sheet members) are produced in step (a), and their gel times areadjusted together in step (b) through the thermal treatment, the cure ofthe thermosetting resin contained in all of the thermally conductiveresin sheet members attached to a lead frame has proceeded so that atime period required for the production of the thermally conductivesubstrate, and thus a time period required for steps (1) to (3), can beshortened. In addition, the integration of the lead frame with thethermally conductive resin sheet member has already been carried outwhile suppressing the formation of the resin burrs and the stains asdescribed above, so that the presence of the resin burrs and the stainson the lead frame which is to be used for the production of thethermally conductive substrate has been suppressed. Since the heatdissipation metal plate is integrated with such lead frame which hasbeen integrated with the thermally conductive resin sheet member, theresin burrs and the stains present on the exposed surface of the leadframe of the finally obtainable thermally conductive substrate can besuppressed. In particular, when the lead frame which has been integratedwith the thermally conductive resin sheet member is stacked on the heatdissipation metal plate followed by only heating them so as to allow thecure of the thermosetting resin to proceed and then by pressing them toeach other (that is, when step (2) is carried out and then step (3) iscarried out), the presence of the resin burrs and the stains on theexposed surfaces of the lead frame and the heat dissipation metal plateis further suppressed.

In step (1) of the production process of the thermally conductivesubstrate according to the present invention, the heat dissipation metalplate is placed on the thermally conductive resin sheet member of thethermally conductive resin sheet member attached to the lead frame whichis produced by the production process of the thermally conductive resinsheet member attached to the lead frame as described above, so that thelead frame and the heat dissipation metal plate are opposed to eachother. The heat dissipation metal plate to be used is a flat plate whichhas a high thermal conductivity. For example, an aluminum plate, acopper plate or the like may be used. In addition, similarly to the leadframe, a bonding surface of the heat dissipation metal plate which is tobond to the thermally conductive resin sheet member is preferablyroughened, which may be carried out in the same manner as in the case ofthe lead frame. Further, a heat dissipation plate which is not made of ametal may be used as far as it has a similar performance to that of theheat dissipation metal plate. Also, a heat dissipation metal platehaving a main surface opposed to the bonding surface which is not flat(for example, such a main surface is corrugated or has fins) may beused. Such a plate having the non-flat surface may be a member which isused as a so-called heat sink.

In step (2) of the production process of the thermally conductivesubstrate according to the present invention, the thermal treatment iscarried out for the predetermined time period at the temperature whichallows the cure of the thermosetting resin to proceed while the heatdissipation metal plate is stacked on the thermally conductive resinsheet member or the thermally conductive resin sheet member is stackedon the heat dissipation metal plate. It is noted that “thermaltreatment” here in means that an object is kept at a predeterminedtemperature for a predetermined time period while heating the object ifnecessary so as to keep such temperature (in this sense, “thermaltreatment” is also referred to as a heating treatment). Usually, theobject is placed in an atmosphere at a predetermined temperature for apredetermined time period, and such time period and such temperaturecorrespond to the predetermined time period and the predeterminedtemperature of the thermal treatment, respectively. Upon completion ofthe thermal treatment in this step, pressing the heat dissipation metalplate and the lead frame to each other is not positively carried out.This does not mean that any unavoidable pressure is excluded. Forexample, pressures which are generated because of the weight of the heatdissipation metal plate, the lead frame, the thermally conductive resinsheet member and so on are not excluded. The temperature which allowsthe cure may be a temperature which is the same as or higher than thetemperature at which the gel time is adjusted. Usually, the temperaturemay be equal to or higher than a temperature which a manufacturer of thethermosetting resin recommends so as to cure the thermosetting resin.Generally, it is particularly preferable that the temperature is higherthan a curing temperature of the thermosetting resin, and the curingtemperature is understood to be a peak temperature obtained by thethermal analysis of the thermosetting resin. The step (2) is usuallycarried out at a temperature in the range usually between 100° C. and230° C. and preferably between 140° C. and 180° C. The predeterminedtime period of the thermal treatment is usually within one minute,preferably within 30 seconds, and for example about 15 seconds.

As clearly seen, the predetermined time period of the thermal treatmentand the temperature which allows the cure (thus, the temperature of thethermal treatment) are selected appropriately depending on thethermosetting resin to be used. The selection should be carried out soas to avoid an excessive extent of the cure progress which leads torapid decrease of a bonging property of the thermally conductive resinsheet member, which results in insufficient integration of the thermallyconductive substrate which is obtained after step (3). The selectionshould also be carried out so as to avoid a less extent of the cureprogress, which leads to a relatively low viscosity of the thermallyconductive resin sheet member, which results in the formation of theresin burrs, the stains and the like on the exposed surfaces of the leadframe and the heat dissipation metal plate of the thermally conductivesubstrate which is obtained after step (3). Such temperature and suchtime period of the thermal treatment can be selected by thetrial-and-error method as in the case of the selection of thepredetermined temperature and the predetermined time which give thepredetermined gel time described above.

In step (3) of the production process of the thermally conductivesubstrate according to the present invention, the thermal treatment iscontinued after step (2), and the heat dissipation metal plate and thelead frame are pressed to each other at a temperature which allows thecure to continue (which temperature may be higher or lower as requiredthan the temperature of step (2)), namely positive pressing is carriedout. In this step, the cure of the thermosetting resin further proceedsso that the thermosetting resin achieves a so-called rigid state. Such astate is not necessarily a completely cured state as far as such stateallows the use of the thermally conductive substrate. In step (3),pressing is carried out at a temperature in the range usually between100° C. and 230° C., preferably between 120° C. and 200° C., morepreferably between 130° C. and 180° C. and for example 140° C. under apressure in the range between 1 MPa and 20 MPa, preferably between 4 MPaand 19 MPa, more preferably between 6 MPa and 18 MPa, and for example 14MPa for a time period in the range between 1 minute and 120 minutes,preferably within 5 minutes and 60 minutes, more preferably within 8minutes and 30 minutes and for example 10 minutes.

Therefore, in the production process of the thermally conductivesubstrate according to the present invention, when the cure has not beenfinished completely after step (3), the produced thermally conductivesubstrate is preferably subjected to an additional thermal treatment ifnecessary (namely, subjected to heating) so that the thermosetting resinis sufficiently cured. Such additional treatment should of course becarried out at a temperature which allows the further cure, and the timeperiod and the temperature of the treatment can be selectedappropriately depending on an extent of the cure. Such additionalthermal treatment is carried out at a temperature in the range usuallybetween 100° C. and 230° C., preferably between 120° C. and 200° C.,more preferably between 150° C. and 180° C. and for example 175° C. fora time period in the range between 1 hour and 10 hours, preferablywithin 2 hours and 9 hours, more preferably within 3 hours and 7 hoursand for example 6 hours. If necessary, pressing may be carried out uponthe treatment under a pressure in the range between 1 MPa and 20 MPa,preferably between 3 MPa and 19 MPa, more preferably between 4 MPa and18 MPa, and for example 6 MPa.

In the fourth aspect of the present invention, there is provided anotherprocess of producing a thermally conductive substrate comprising athermally conductive resin sheet member, a lead frame and a heatdissipation metal plate. The process comprises:

(A) forming a thermally conductive resin sheet member from a materialcomprising an inorganic filler and a thermally conductive resincomposition which comprises at least a thermosetting resin;

(B) thermally treating the thermally conductive resin sheet member sothat it has a predetermined gel time;

(C) placing the heat dissipation metal plate on the thermally conductiveresin sheet member and pressing them to each other at a temperaturewhich does not allow cure of the thermosetting resin to proceed, so thatthey are integrated together;

(D) placing a lead frame on the thermally conductive resin sheet memberwhich has been integrated with the heat dissipation metal plate so thatthe lead frame and the heat dissipation metal plate are opposed throughthe thermally conductive resin sheet member; and

(E) thermally treating the lead frame and the thermally conductive resinsheet member which has been integrated with the heat dissipation metalplate at a temperature which is not lower than a temperature whichallows the cure of the thermosetting resin to proceed while pressing thelead frame and the metal heat dissipation plate to each other under at apredetermined pressure and allowing the cure of the thermosetting resinto proceed.

In the above production process of the thermally conductive substrate,the above explanations as to the step to produce the thermallyconductive resin sheet member (the above step (a)) and the step toadjust the gel time (the above step (b)) are applicable to steps (A) and(B). Also, similarly to the above, the detailed explanations as to thefirst to the third aspects of the present invention are applicable tothe fourth aspect as far as nothing adverse occurs.

In step (C) of the above production process of the thermally conductivesubstrate, the heat dissipation metal plate is stacked on the thermallyconductive resin sheet member followed by thermally treating them at atemperature which does not allow the cure of the thermosetting resin toproceed while pressing them so that they are integrated together. Inthis step, the above explanations as to the step to stack the lead frameon the thermally conductive resin sheet member and integrate themtogether (the above step (c)) are applicable. It is noted that the“temperature which does not allow the cure of the thermosetting resin toproceed” is the same temperature as in the integration of the lead frametogether with the thermally conductive resin sheet member.

In step (D) of the above production process of the thermally conductivesubstrate, the lead frame and the metal heat dissipation metal plate areplaced so that they oppose to each other as in step (1) as describedabove. Further, step (E) is similar to step (3) as described above (andthus the explanations as to step (3) are applicable to step (E)), andthe lead frame and the heat dissipation metal plate are pressed to eachother while thermally treating them so as to cure the thermosettingresin. It is noted that in this other production process of thethermally conductive substrate, a step of heating without pressing(which corresponds to the step (2) as described above) is not essential,but such heating step may be carried out. Similarly to the above, whenthe cure of the thermosetting resin of the produced thermally conductivesubstrate has not been completed and additional cure is desired, anadditional thermal treatment may be carried out so as to achieve asufficient extent of the cure.

The present invention is based on the thermally conductive resin sheetmember attached to the lead frame in which the thermally conductiveresin sheet member is produced by forming the sheet form article fromthe thermosetting resin mixture including the inorganic filler and thethermosetting resin of which cure has not yet proceeded, and adjustingthe gel time of the sheet form article, and in which such thermallyconductive resin sheet member of which thermosetting resin is in thesemi-cured or partly cured condition is integrated with the lead framepreferably while the thermally conductive resin sheet member is filledup to the surface of the lead frame.

Such thermally conductive resin sheet member attached to the lead frameaccording to the present invention is used for the production of thethermally conductive substrate which is superior in its thermalradiation. In such production, the thermally conductive resin sheetmember is thermally pressed with the heat dissipation metal plate so asto cure the thermosetting resin while containing a large amount of theinorganic filler and also to integrate the lead frame, the thermallyconductive resin sheet member and the heat dissipation metal platetogether, whereby the thermally conductive substrate is readilyobtained. In addition, the thermally conductive resin sheet member isaccordingly reinforced by the lead frame due to the integration of thethermally conductive resin sheet member with the lead frame, which leadsto handling improvement of the thermally conductive resin sheet member.

EMBODIMENTS OF THE INVENTION

The thermally conductive resin sheet member attached to the lead frameand the production process thereof, and the production process of thethermally conductive substrate using the thermally conductive resinsheet member attaching lead frame will be hereinafter explained indetail with reference to the accompanied drawings.

Embodiment 1

FIG. 1 schematically is a cross-sectional view which shows aconstruction of the thermally conductive resin sheet member attached tothe lead frame of the present invention. In FIG. 1, the thermallyconductive resin sheet member 101 is integrated with the lead frame 102,and fills the through-openings 103 so as to reach the exposed surface ofthe lead frame (the upper surface in the shown embodiment). Thus, thethermally conductive resin sheet member 101 together with the lead frame102 forms a single surface (namely, an upper side flush surface). It isnoted that the thermally conductive resin sheet member 101 is made of amixture which includes, for example, 70 to 95 parts by weight of aninorganic filler and 5 to 30 parts by weight of a resin compositioncontaining at least the thermosetting resin, and the thermallyconductive resin sheet member is in the semi-cured state.

Embodiment 2

FIGS. 2( a) to 2(c) schematically show the steps of the productionprocess of the thermally conductive resin sheet member attached to thelead frame according to the present invention. The materials to be usedare similar to those which are described in the above descriptions(including those of Embodiment 1) unless specifically explained.

FIG. 2( a) shows the thermally conductive resin sheet member 201 whichis produced from the thermosetting resin mixture, and of which gel timehas been adjusted to a predetermined time as will be described below.

The thermally conductive resin sheet member 201 is produced by applyingthe thermosetting resin mixture onto a substrate (which may be a releasefilm) to produce a film or sheet member, followed by drying to removethe solvent so that almost no solvent is left in the film member. Whenthe thermally conductive resin sheet member 201 is thus formed, it ispreferably that the cure of the thermosetting resin contained thereindoes not proceed, so that the thermally conductive resin sheet member201 has a long gel time at this stage and therefore it can be storedstably for a long time period.

Then the thermally conductive resin sheet member 201 thus obtained isthermally treated so that it is adjusted to have the predetermined geltime, followed by cooling it to a temperature which does notsubstantially allow the cure. The thermal treatment can be carried outby keeping the thermally conductive resin sheet member 201 at apredetermined temperature for a predetermined time period (heating maybe carried out for such treatment when necessary), and for example adrying oven may be used for the treatment. In the thermal treatment, aplurality of the thermally conductive resin sheet members, preferablymany members, can be effectively treated together beforehand. Themembers are integrated with the lead frame later on, and the formationof the resin burrs and the stains can be suppressed upon the integrationof the thermally conductive sheet member with the lead frame. Inaddition, the thermal treatment also removes the rest of the solventwhich was used for the viscosity adjustment upon the production of thethermally conductive resin sheet member (or the film member formation)as well as a moisture content which was absorbed during storing andhandling of the sheet member. The treatment further improves handling ofthe thermally conductive resin sheet member because the tackiness of thethermally conductive resin sheet member is reduced. The thermaltreatment is desirably carried out at a temperature which is lower thanthe curing temperature of the thermosetting resin contained in thethermally conductive resin sheet member, and it may be carried out undera vacuum condition or a reduced pressure condition in order to reducevoids in the thermally conductive resin sheet member.

In FIG. 2( b), the lead frame 202 is placed on the thermally conductiveresin sheet member 201 which has the predetermined gel time. They arepressed at a temperature which does not allows curing of thethermosetting resin contained in the thermally conductive resin sheetmember (for this purpose, heating may be carried out if necessary), andthe thermally conductive resin sheet member attached to the lead frameaccording to the present invention is obtained while the thermallyconductive resin sheet member 201 fills the lead frame 202 up to itssurface and they are integrated together as shown in FIG. 2( c). It isnoted that heating may be carried out while the lead frame 202 is not incontact with the thermally conductive resin sheet member 201, or whilethe lead frame 202 is in contact with the thermally conductive resinsheet member 201. Further, pressing may be carried out simultaneouslywith or after heating, or heating may be carried out after pressing.

In this embodiment, the thermally conductive resin sheet member isdesirably formed to have the predetermined shape after the thermaltreatment of the thermally conductive resin sheet member for adjustingthe gel time. It is noted that “formed to have the predetermined shape”means that a dimension(s) of the formed thermally conductive resin sheetmember is close to the predetermined one(s), and preferablysubstantially the same as predetermined. It is possible by suchformation to control the weight of the thermally conductive resin sheetmember (that is, to obtain the thermally conductive resin sheet memberwhich has a predetermined weight or volume).

FIGS. 3( a) to 3(d) and FIGS. 4( a) to 4(d) schematically show the stepsto form the thermally conductive resin sheet member into thepredetermined shape. It is noted that in those drawings, cross-sectionalviews are shown on the left hand side in the drawings and top views areshown on the right hand side in the drawings.

FIG. 3( a) shows a thermally conductive resin sheet member 301 for whichgel time has been adjusted by the thermal treatment as described withreference to FIG. 2. As shown in FIG. 3( b), the thermally conductiveresin sheet member 301 is sandwiched between a pair of plates 302between which a spacer 305 having a thickness of L is located, and theplates are arranged such that a spacing between them can be narrowed toa predetermined spacing (L). Thereafter, the plates are moved towardeach other up to the predetermined spacing so that the thermallyconductive resin sheet member 301 is pressed. FIG. 3( c) shows thethermally conductive resin sheet member 303 which is removed from thespacing between the plates after pressing. Such thermally conductiveresin sheet member 303 has a fixed thickness which corresponds to thethickness (L) of the spacer. Thereafter, the thermally conductive resinsheet member 303 is processed (for example, cut) according to thepredetermined shape thereof so as to provide the thermally conductiveresin sheet member 304 as shown in FIG. 3( d) having the predeterminedshape. Since the thermally conductive resin sheet member 304 has aconstant thickness, an amount (size) per unit area of the thermallyconductive resin sheet member 304 becomes constant (namely, the size iscontrolled). Further, the thermally conductive resin sheet member 304has a predetermined shape, an amount of the thermally conductive resinsheet member 304 as a whole also becomes constant, and such amount isalso controlled.

The pair of plates 302 used in this case are not particularly limited asfar as material and shape, and are selected so that the plates are notsubstantially deformed in the above operations. For example, a pair offlat plates between which a fixed gap is formed, or a die combined witha punch and a predetermined opening may be used as the plates 302.Especially, punching using the die is preferable. This is because thepredetermined shape can be formed in a short time period with goodaccuracy. As a material for the plates, for example, a silicon steel, astainless steel or the like may be used.

The formation into the predetermined shape as described above ispreferably carried out under a temperature condition which does notsubstantially allow the progress of the cure of the thermosetting resincontained in the thermally conductive resin sheet member. Such conditionmay be substantially the same as that for the integration of thethermally conductive resin sheet member with the lead frame.

More concretely, the temperature upon sandwiching by the pair of theplates and pressing the thermally conductive resin sheet member, forexample, a temperature of the plate and/or a temperature of thethermally conductive resin sheet member, or a temperature of anatmosphere in which such pressing is carried out, is preferably atemperature at which the cure of the thermosetting resin does notsubstantially proceed. However, pressing may be carried out at atemperature which is higher than the temperature at which the cure ofthe thermosetting resin does not substantially proceed even though thecure proceeds more or less. This is because pressing at such highertemperature reduces the viscosity of the thermally conductive resinsheet member so that the control of the amount becomes easy. Thetemperature for the formation into the predetermined shape as describedabove may be selected depending on the viscosity of the thermallyconductive resin sheet member to be formed at the temperature, but it isgenerally in a preferably range between 50° C. and 90° C. A highertemperature than such range is likely to provide a tackiness of thethermally conductive resin sheet member, and also to lead to excessiveprogress of the cure of the thermosetting resin.

It is noted that the pressure upon pressing is not particularly limitedas long as the thermally conductive resin sheet member having thepredetermined thickness is formed. The pressure is usually in a rangebetween 2 MPa and 20 MPa. When the pressure is lower than such range, itmay be difficult to control to give a constant thickness to thethermally conductive resin sheet member due to insufficient pressure. Onthe other hand, when the pressure is larger than such range, the plateshave to be sufficiently strong and also a pressing machine should havelarge durability, which is practically disadvantageous. Pressing iscarried out with a pressure preferably in the range between 6 MPa and 15MPa and for example 10 MPa for a time period in the range usuallybetween 10 seconds and 100 seconds, preferably 20 seconds and 60 secondsand for example 30 seconds.

It is noted that after the production of the thermally conductive resinsheet member having the predetermined shape, the viscosity of thethermally conductive resin sheet member is preferably not larger than20000 Pa.s, and more preferably in the range between 1000 Pa.s and 20000Pa.s. When the viscosity is greater than 20000 Pa.s, the thermallyconductive resin sheet member may be hard so that it may be difficult tocontrol the sheet thickness upon pressing. That is, because of the highviscosity, shape change of the sheet member is unlikely to occur so thatthe predetermined thickness cannot be achieved if the pressing pressureis low, or if the pressing pressure is high so as to obtain thepredetermined thickness, breakage of the sheet member itself may occur.When the viscosity of the thermally conductive resin sheet member is toolow upon pressing, maintenance of the sheet shape is not easy.

When the thermally conductive resin sheet member of which thickness hasbeen controlled is formed into the predetermined shape (for example,when punching out is carried out as described above), the thermallyconductive resin sheet member is preferably heated to a temperaturewhich is lower than the curing temperature of the thermosetting resincontained in the thermally conductive resin sheet member, and forexample to a temperature in the range between 40° C. and 90° C. Suchheating decreases the viscosity of the thermally conductive resin sheetmember so that punching out becomes easy which avoids cracking orbreaking of the thermally conductive resin sheet member. At atemperature higher than such temperature range, the thermally conductiveresin sheet member is likely to have the tackiness, which makes punchingout difficult.

FIGS. 4( a) to 4(d) show the steps of another production process of thethermally conductive resin sheet member which is used for the productionof the thermally conductive resin sheet member attached to the leadframe according to the present invention. In FIG. 3, a single thermallyconductive resin sheet member is formed to have the predetermined shape.FIG. 4 is different from FIG. 3 in that a plurality of the thermallyconductive resin sheet members are stacked together followed by pressingthem to obtain a single thermally conductive resin sheet member 403which, as a whole, has the predetermined thickness. Then the resultingthermally conductive resin sheet member 403 is formed into the thermallyconductive resin sheet member 404 having the predetermined shape as inthe above embodiment.

In the embodiment shown in FIG. 4, a thick thermally conductive resinsheet member 403 can be obtained by laminating a plurality of thethermally conductive resin sheet members 401 even though each of themhas a relatively small thickness. Therefore, as to a thermallyconductive resin sheet member having a large thickness which could notbe obtained without laminating a plurality of the thermally conductiveresin sheet members, only a single time pressing can convenientlycontrol the thickness and an amount of the thermally conductive resinsheet member.

It is noted that upon stacking the plurality of thermally conductiveresin sheet members 401, they are preferably arranged such that backsurfaces and front surfaces thereof are oriented systematically (namely,as to each of the thermally conductive resin sheet members, its backsurface is facing downward in the arrangement, or front surface isfacing upward in the arrangement). The front surface of the thermallyconductive resin sheet member is an exposed surface when a film memberto be the member is formed on a substrate using the thermosetting resinmixture, and the bottom surface is a surface which is in contact withthe substrate upon such formation. Staking in such arrangement, possibleslight differences in a composition and an amount of the remainingsolvent of the thermally conductive resin sheet member between the frontsurface and the back surface can substantially be averaged, and a frontsurface and a back surface of the produced integrated thermallyconductive resin sheet member can be easily identified.

In each of the above embodiments, a release film is provided on each ofthe upper and lower main surfaces of the thermally conductive resinsheet member when it is sandwiched and pressed by the pair of plates orprovided on each of the uppermost and lowermost surfaces of a whole bodyproduced by stacking the plurality of thermally conductive resin sheetmembers. The release film prevents the thermally conductive resin sheetmember having a controlled thickness from bonding to the plate, andmakes it easy to remove the sheet member from the space between theplates. As such parting film, a release film which is the same as thoseused for the production of the thermally conductive resin sheet membermay be used.

Embodiment 3

FIGS. 5( a) to 5(d) schematically show the steps of another productionprocess of the thermally conductive resin sheet member attached to thelead frame according to the present invention. As to the materials andthe conditions to be used, the details as described above are applicableunless specifically explained.

A plurality of the thermally conductive resin sheet members 501 each ofwhich gel time has been adjusted as shown in FIG. 5( a) are stacked onthe lead frame 502 as shown in FIG. 5( b) and placed between a pair ofthe plates 503 which are designed so that they approach each other sothat the spacing between the plates becomes a predetermined spacing.Then, the plates are allowed to approach the predetermined spacing at atemperature which does not allow the cure of the thermosetting resincontained in the thermally conductive resin sheet member 501 to proceed,so that the thermally conductive resin sheet members 501 and the leadframe 502 are pressed.

By doing so as described above, the thermally conductive resin sheetmember 501 which is integrated with the lead frame 502 is produced asshown in FIG. 5( c). It is noted that the plurality of the thermallyconductive resin sheet members are integrated together as shown, andsuch state is shown in FIGS. 5( c) and 5(d). In addition, curing of thethermosetting resin contained in the thermally conductive resin sheetmember has not substantially proceeded, so that the adjusted gel timehas not been substantially changed.

In this embodiment, the thermally conductive resin sheet member not onlyfills the through-openings of the lead frame but also is bonded to thelead frame. In addition, a thickness of the integrated product of thelead frame and the thermally conductive resin sheet member issimultaneously controlled to be the predetermined thickness. It is notedthat a peripheral portion of the lead frame and an edge portion of thethermally conductive resin sheet member are not concerned with thethickness control. Thereafter, only the thermally conductive resin sheetmember 501 is processed into the predetermined shape so that thethermally conductive resin sheet member attached to the lead frame isproduced such that an amount (size) of the thermally conductive resinsheet member has been controlled.

In this embodiment, the plurality of the thermally conductive resinsheet members have been stacked and integrated with the lead frame whilethe thickness control has been carried out. However, the number of thethermally conductive resin sheet members may be one, and in this case, asimilar thermally conductive resin sheet member attaching to the leadframe is obtained.

Embodiment 4

FIGS. 6( a) to 6(d) schematically show cross-sectional views and topviews of steps of a further embodiment of the production process of thelead frame attached to the thermally conductive resin sheet memberaccording to the present invention. As to the materials and theconditions to be used, the details as described above are applicableunless specifically explained. It is noted that the top views of FIGS.6( b) to 6(d) show one possible embodiment of the area of the thermallyconductive resin sheet member attached to the lead frame surrounded bythe dotted line in FIG. 6( a).

FIG. 6( a) shows the thermally conductive resin sheet member attached tothe lead frame which is produced by any one of the processes asdescribed above wherein the thermally conductive resin sheet member 601of which thermosetting resin is in the semi-cured state fills the leadframe 602 up to its surface and is integrated with the lead frame 602.In the shown lead frame 602, the outer frame portion 610 can function asan outermost common terminal, and each circuit pattern or each terminalwhich belongs to the pattern is ultimately connected to the outermostcommon terminal through a common terminal 612 which leads to the outerframe portion 610.

The outer frame portion 610 is cut off together with a portion of eachcommon terminal 612 of the periphery of the lead frame which terminalleads to the outer frame portion after the heat dissipation metal plateis integrated thereafter with the thermally conductive resin sheetmember attaching lead frame. Therefore, a remaining portion of eachcommon terminal 612 of the periphery of the lead frame which terminalextends outward becomes an output electrode of the thermally conductivesubstrate. Since all of the circuit patterns are electrically (and thusalso mechanically) connected to the outer frame portion 610 through thecommon terminals 612, and the lead frame is integrated with thethermally conductive resin sheet member except the outer frame portion610 and a portion of each common terminal of the lead frame, falling offof any terminal or circuit pattern of the lead frame is prevented, whichimproves handling of the lead frame. It is noted that in FIG. 6( a),each common terminal 612 of the lead frame is connected to the outerframe portion 610, to which the present invention is not limited, andthe lead frame may be of another form.

In FIG. 6, the lead frame 602 is located over substantially all of thethermally conductive resin sheet member 601, but it is not alwaysnecessary that the lead frame be present an entirety of one main surfaceof the thermally conductive resin sheet member. Therefore, in anotherembodiment, the lead frame may be placed on a portion of one surface ofthe thermally conductive resin sheet member.

In a further embodiment of the lead frame which is integrated with thethermally conductive resin sheet member according to the presentinvention, a circuit pattern or a terminal which is electricallyindependent of the lead frame may be integrated with the thermallyconductive resin sheet member on the same side thereof on which the leadframe is present.

FIG. 6( b) to FIG. 6( d) show the enlarged portion of FIG. 6( a)surrounded by the dotted line. The lead frame integrated with thethermally conductive resin sheet member according to the presentinvention may have a circuit pattern or a terminal 600 which is notelectrically connected to any circuit pattern of the lead frame as shownin FIG. 6( d). The circuit pattern 600 present thus does notindependently fall off the thermally conductive resin sheet memberbecause of being held by the thermally conductive resin sheet member 601even though it is electrically separated from the other circuit patternsas if it were an isolated island. Such non-falling off improves thehanding thereof.

The isolated island like circuit pattern (or terminal) as describedabove may be one which is originated from a portion of the lead frame,and may be formed by processing the lead frame which has been integratedwith the thermally conductive resin sheet member. Concretely, a portionof the lead frame which has been integrated with the thermallyconductive resin sheet member is removed so as to leave a desiredcircuit pattern 600 in an isolated island-like form. Such removal may becarried out by punching out a portion of the lead frame 606 which isadjacent to the desired circuit pattern 600 together with a portion ofthe thermally conductive resin sheet member just below the former(punched out) portion of the lead frame using a pin 604 and a die 605 ofa punching machine as shown in FIG. 6( b) so as to form a through-hole603 as shown in FIG. 6( c). Although punching out is carried out usingthe punching machine herein, the removal is of course not limited tosuch a punching machine, and any other method may be optionally selecteddepending on a thickness of the thermally conductive resin sheet memberattached to the lead frame, a diameter of a desired through-hole and soon. For example, a punching processing operation which uses a die,drilling processing, or the like may be employed. Such processing ispreferable since it conveniently provides high positional accuracy.

It is noted that such processing of the lead frame as described abovemay be carried out in other embodiments. For example, the processing maybe carried out by removing a portion of the lead frame after the stepshown in FIG. 2( c). Further, when only a portion of the lead frame is,for example, mechanically cut off or removed by etching, a portion ofthe thermally conductive resin sheet member does not have to be removed.

In the embodiment shown in FIG. 6, heating and pressing of the thermallyconductive resin sheet member attached to the lead frame under acondition which does not allow the cure of the semi-cured thermosettingresin to further proceed after the formation of the through-hole 603 asshown in FIG. 6( c) can fill the through-hole 603 with a portion of thethermally conductive resin sheet member which portion is present aroundthe through hole 603 as shown in FIG. 6( d). In the thus-describedmanner, a thermally conductive resin sheet member is produced which isintegrated with the lead frame while further comprising the circuitpattern or terminal which is electrically independent of the lead frame.In the above description, the portion of the thermally conductive resinsheet member around the through-hole is fluidized so as to fill thethrough-hole with the thermally conductive resin sheet member in thesemi-cured state by pressing, to which filling is of course not limited.For example, a desired amount of the thermally conductive resin sheetmember in a non-cured state or the semi-cured state, and preferably asmall piece of such thermally conductive resin sheet member, isseparately supplied to the through-hole followed by heating and pressingit under the condition which does not allow the cure.

Embodiment 5

FIGS. 7( a) to 7(d) schematically show cross-sectional views of steps ofan embodiment of the production process of the thermally conductivesubstrate according to the present invention. As to the materials andthe conditions to be used, the details as described above are applicableunless specifically explained.

FIG. 7( a) shows a thermally conductive resin sheet member attached to alead frame 700 according to the present invention which is produced asin the steps of, for example, Embodiment 2 or Embodiment 3 as describedabove. The thermally conductive resin sheet member 701 in the semi-curedstate fills the openings of the lead frame 702 up to its surface whileit is integrated with the lead frame 702. It is noted that a thicknessand thus an amount (size) per unit area of the thermally conductiveresin sheet member has been preferably controlled as described withreference to FIGS. 3 and 4 and also explained in combination withEmbodiment 3. More preferably, a volume of a single piece of thethermally conductive resin sheet member is predetermined. Also, thethermally conductive resin sheet member attached to the lead frame 700may have the construction which has been explained in Embodiment 4 withreference to FIGS. 6( a) to 6(d).

As shown in FIG. 7( b), the heat dissipation metal plate 703 is stackedon and aligned with a surface of the thermally conductive resin sheetmember attached to the lead frame 700, which surface is opposite to thelead frame 702. As a result, the lead frame 702 is opposed to the heatdissipation metal plate 703 through the thermally conductive resin sheetmember 701. Then, these are thermally treated while pressing them sothat the thermosetting resin contained in the thermally conductive resinsheet member is cured, whereby the heat dissipation metal plate 703 isbonded to and integrated with the thermally conductive resin sheetmember attached to the lead frame 700 as shown in FIG. 7( c) so that thethermally conductive substrate is produced.

The thermal pressing as described above is preferably carried out in thefollowing two separate steps. The first step involves thermally treatingthe thermally conductive resin sheet member attached to the lead frame700 on which the heat dissipation metal plate 703 is stacked for apredetermined time period at a temperature not lower than a temperaturewhich allows the cure of the thermosetting resin to proceed, andpreferably a temperature not lower than the curing temperature withoutpressing. The second step involves pressing the resin sheet member, thelead frame, and the heat dissipation plate at a predetermined pressurewhile keeping their temperature or keeping them at a differenttemperature (which may be raised to a higher temperature or reduced to alower temperature when necessary) so that the thermosetting resin isfurther cured (i.e., continuing the thermal treatment with pressing). Itis noted that integrating the thermally conductive resin sheet memberwith the lead frame before the integration with the heat dissipationmetal plate suppresses overflow of the thermosetting resin mixture overthe surface of the lead frame in the production of the thermallyconductive substrate by thermally pressing the heat dissipation metalplate stacked on the thermally conductive resin sheet member attached tothe lead frame so that the suppression effect of the formation of theresin burrs and stains is provided.

Also, in the step of heating the thermally conductive resin sheet memberattached to the lead frame on which the metal heat dissipation plate isstacked without pressing them for the predetermined time period at atemperature which is not lower than the temperature which allows thecure of the thermosetting resin to start, when an extent of the cureprogress of the thermally conductive resin sheet member has beenadjusted before pressing, an excessive flow of the thermosetting resinmixture onto the surface of the lead frame upon the pressing thereafterso that the suppression effect of the surface stains is provided.

The temperature of thermal treatment for the production of the thermallyconductive substrate may be selected depending on the thermosettingresin to be used, but it is usually in the range between 100° C. and230° C. When the temperature is lower than such range, curing may beinsufficient, and when the temperature is higher than such range, theresin may be likely to start its decomposition. The preferabletemperature in the range between 130° C. and 180° C., and for example140° C. The pressure upon pressing is not particularly limited, but itis preferable that the pressure is in the range between 1 MPa and 20MPa, and for example 14 MPa. When the pressure is lower than such range,bonding between the thermally conductive resin sheet member or the leadframe and the heat dissipation metal plate is insufficient so thatdelamination may be likely to occur. When the pressure is higher thansuch range, the substrate is likely to be broken. In the step of thethermal treatment without pressing, the time period of the thermaltreatment is in a range usually between 1 second and 60 seconds,preferably between 5 seconds and 30 seconds, more preferably 10 secondsand 20 seconds and for example 15 seconds. Further, in the step ofthermal treatment with pressing, the time period of the thermaltreatment is in the range usually between 1 minute and 120 minutes,preferably between 5 minutes and 60 minutes, and more preferably 8minutes and 30 minutes.

It is noted that there may be a case in which the cure extent of thethermosetting resin of the thermally conductive substrate as describedabove is not necessarily sufficient. In such case, the thermallyconductive substrate obtained according to the above process can befurther thermally treated so that the cure extent can be increased so asto substantially complete the cure.

Embodiment 6

FIGS. 8( a) to 8(e) schematically show cross-sectional views of steps ofother embodiment of the production process of the thermally conductivesubstrate according to the present invention. As to the materials andthe conditions to be used, the details as described above are applicableunless specifically explained.

FIG. 8( a) shows the thermally conductive resin sheet member 801, whichhas been adjusted by using, for example, a drying oven so as to have thepredetermined gel time for the purpose of using the sheet. Therefore,the thermosetting resin contained in the thermally conductive resinsheet member is in the semi-cured state. It is noted that after such anadjusting step, the thus-obtained thermally conductive resin sheetmember 801 is preferably processed to have a predetermined shape asdescribed above. By doing so, a thickness and/or a weight of thethermally conductive resin sheet member can be controlled.

Then, the heat dissipation metal plate 803 and the thermally conductiveresin sheet member 801 are stacked as shown in FIG. 8( b). Thereafter,they are thermally pressed as shown in FIG. 8( c) at a temperature whichdoes not allow the cure of the thermally conductive resin sheet memberin the semi-cured state to further proceed, so that the thermallyconductive resin sheet member is press-bonded to (integrated with) theheat dissipation metal plate. The conditions for the temperature and thepressure at this stage may be the same as those for the integration ofthe lead frame with the thermally conductive resin sheet member for theproduction of the thermally conductive resin sheet member attached tothe lead frame according to the present invention.

Then, as shown in FIG. 8( d), the lead frame 802 is placed on thethermally conductive resin sheet member with which the heat dissipationmetal plate has been integrated. Therefore, the heat dissipation metalplate 803 is opposed to the lead frame 802 through the thermallyconductive resin sheet member 801 while aligning them.

Thereafter, by thermally treating them while pressing, thethrough-openings of the lead frame 802 are filled with the thermallyconductive resin sheet member 801 and the thermally conductive resinsheet member is integrated with the lead frame, so that the lead frameand the thermally conductive resin sheet member together form a singlesurface. Upon such thermal pressing, the heat dissipation metal plate803 bonds to the thermally conductive resin sheet member more firmly toproduce the integrated thermally conductive substrate, although the heatdissipation metal plate 803 has already been integrated with thethermally conductive resin sheet member 801. The thermal treatment atthis stage may be carried out by initially thermally treating withoutpressing, and then pressing as described with reference to theintegration with the heat dissipation metal plate in Embodiment 5.However, thermal treating and pressing may be carried out from thebeginning. The conditions for the thermal treatment and the pressing maybe the same as those for the integration with the heat dissipation metalplate in Embodiment 5 wherein the thermal treatment and the pressing arecarried out together. Optionally, the resulting thermally conductivesubstrate may be further thermally treated so as to ensure sufficientcure of the thermally conductive resin sheet member.

EXAMPLES

The present invention will be hereinafter further explained in detailwith reference to Examples.

Example 1

A thermally conductive resin sheet member which was used for thisExample was produced. First, a thermosetting resin mixture in a slurryform was prepared by mixing an inorganic filler and a thermosettingresin as well as the following components, of which compositions areshown below:

(1) Inorganic filler: Al₂O₃ (AS-40 having an average   89 parts byweight particle diameter of 12 μm, manufactured by Showa Denko) (2)Thermosetting resin: bromated polyfunctional   10 parts by weight epoxyresin (NVR-1010 containing a curing agent, manufactured by JAPAN RECCO., LTD.) (3) Other additives Curing accelerator (iminazole,manufactured by 0.05 parts by weight JAPAN REC CO., LTD.) Carbon black(manufactured by Toyo Carbon)  0.4 parts by weight Coupling agent(Plenact, manufactured by 0.55 parts by weight Ajinomoto)

MEK was added as a solvent in addition to the above components, and theywere mixed with a kneader (manufactured by Matsuo-Sangyo). It is notedthat a viscosity of the mixture was reduced by the addition of the MEKso that it was readily formed into a slurry, and the MEK was removed byevaporation thereof so that no amount of MEK is referred to above.

Using the slurry, a film of the slurry was formed in the doctor blademethod on a release film made of a polyethylene terephthalate (PET), asurface of which was subjected to the release treatment. Thereafter, thefilm was dried at a temperature of 90° C. for 60 minutes so that thesolvent was evaporated, whereby a thermally conductive resin sheetmember (150 mm×150 mm) was obtained which had a thickness of 1.0 mm andwhich contained the thermosetting resin in the semi-cured state.

Then, a thermally conductive resin sheet member attached to a lead framewas formed. A lead frame was prepared by etching a copper plate having athickness of 0.5 mm (manufactured by Kobe Steel) in a known etchingtechnique so as to form a circuit pattern followed by nickel plating.Thereafter, one surface of the lead frame was roughened by sand blasting(abrasive powder: Al₂O₃, (Trade name: Morandom A-40) manufactured byShowa Denko).

Next, the thermally conductive resin sheet members obtained in the aboveprocess were thermally treated in a drying oven at a temperature of 100°C. By varying a time period of the thermal treatment variously, thethermally conductive resin sheet members were adjusted to have differentgel times (Experiments “a” to “f”). It is noted that the temperature ofthe thermal treatment is a set temperature of the drying oven, and thetime period of the thermal treatment is a period for which the thermallyconductive resin sheet member was held in the drying oven.

A frame-like spacer having an outer size of 250 mm×250 mm, a thicknessof 0.8 mm and a center through opening which had a size of 160 mm×160 mmwas placed between two flat plates made of stainless steel SUS 304 (250mm×250 mm), and the plates were heated to a temperature of 70° C. A PETfilm having a thickness of 75 m was place on a surface of each side ofthe thermally conductive resin sheet member of which gel time wasadjusted, and then the thermally conductive resin sheet member wasplaced in the through opening. By making the flat plates approach eachother, the thermally conductive resin sheet member was pressed with apressure of 3 MPa for one minute. Thereafter, the thermally conductiveresin sheet member was taken out to obtain the thermally conductiveresin sheet member of which thickness was controlled. Then, the PET filmwas peeled off from one of the surfaces of the thermally conductiveresin sheet member, from which a thermally conductive resin sheet memberhaving a size of 100 mm×100 mm was stamped out using a die while keepingthe thermally conductive resin sheet member at a temperature of 70° C.so that the thermally conductive resin sheet member having a controlledamount per unit area thereof was obtained. It is noted thatsubstantially no cure of the thermosetting resin proceeded at atemperature of 70° C.

Next, the thus-obtained thermally conductive resin sheet member and thelead frame as described above were thermally pressed similarly to FIG.2( b) at a temperature of 65° C. at a pressure of 10 MPa for 60 seconds.By doing so, the thermally conductive resin sheet member was flowed intopattern gaps, namely the through openings of the lead frame, so that thethermally conductive resin sheet member attached to the lead frame wasobtained in which the thermally conductive resin sheet member filled thegaps in the surface of the lead frame and it was integrated with thelead frame as shown in FIG. 2( c). It is noted that the PET film (notshown) is bonded to the other surface of the thermally conductive resinsheet member.

Then, an aluminum plate having a thickness of 1 mm was provided as ametal heat dissipation metal plate, and both surfaces thereof weresubjected to the sand blasting treatment as in the case of the leadframe. The release film was peeled off from the thermally conductiveresin sheet member attached to the lead frame obtained as describedabove, and the heat dissipation metal plate and the thermally conductiveresin sheet member attached to the lead frame were stacked while beingaligned so that the lead frame and the heat dissipation metal plate wereopposed via the thermally conductive resin sheet member as shown in FIG.7( b).

First, the heat dissipation metal plate and the thermally conductiveresin sheet member attached to the lead frame were heated at atemperature of 140° C. for 15 seconds, and then pressed at a pressure of14 MPa for 10 minutes. By doing so, the thermosetting resin contained inthe thermally conductive resin sheet member cured to be rigid, and theheat dissipation metal plate was bonded to the thermally conductiveresin sheet member so that the thermally conductive substrate wasobtained as shown in FIG. 7( c). In addition, the thermally conductivesubstrate was thermally treated thereafter at a temperature of 175° C.for 6 hours, whereby the cure of the thermosetting resin sufficientlyproceeded so as to complete the thermally conductive substrate.Subsequently, a part is mounted onto the thermally conductive substrateafter the steps of a soldering resist treatment, frame cutting, terminalprocessing and so on are completed. Since these steps can be carried outby known techniques and do not directly relate to the present invention,explanations thereof are omitted.

Using the various thermally conductive resin sheet members which havedifferent gel times (Experiments “a” to “f”), they were integrated withthe lead frames as described above. Then they were integrated with theheat dissipation metal plates, so that various thermally conductivesubstrates were obtained. The thus-obtained thermally conductivesubstrates were evaluated. Especially, a filling extent of the thermallyconductive resin sheet member into the through-openings of the leadframe and the presence of the resin burrs and the stains on the exposedsurface of the lead frame were visually inspected. Further, adhesionstates of the lead frame and the heat dissipation metal plate wereevaluated by observing an interface between the thermally conductiveresin sheet member and the lead frame or the heat dissipation metalplate in each of the thermally conductive substrates using a ScanAcoustic Tomograph (SAT) apparatus. It is noted that the gel time wasobtained by sampling a portion of the thermally conductive resin sheetmember from the obtained thermally conductive resin sheet memberattached to the lead frame and measuring the gel time at a temperatureof 155° C. Results are shown in Table 1 below:

TABLE 1 “a” “b” “c” “d” “e” “f” thermal treatment 40 35 30  20  10  5time period (min.) gel time of 10 20 70 120 180 240 thermally conductiveresin sheet member (sec.) filling extent of X good good good good goodthermally conductive resin sheet member into lead frame adhesion statesof X good good good good good lead frame and heat dissipation metalplate resin burrs and none none none none many too surface stains onmany lead frame

It is noted that “X”, “many” and “too many” are used as evaluationindexes in the Table, and they resulted from relative comparisons (thatis, they merely mean that they are relatively not good), though it doesnot always mean that a thermally conductive substrate having arelatively not good evaluation cannot be used for any of theapplications thereof.

When the gel time of the thermally conductive resin sheet member at astage of the thermally conductive resin sheet member attached to thelead frame is short, the curing reaction has proceeded excessively.Therefore, the thermally conductive resin sheet member did not flow intothe pattern gaps (through openings) so that the gaps were notsufficiently filled up to the surface of the lead frame upon theintegration with the lead frame. In addition, the adhesion state withthe heat dissipation metal plate was not necessarily sufficient upon theintegration with the heat dissipation metal plate.

On the other hand, when the gel time of the thermally conductive resinsheet member is long, the exudation of the thermosetting resin mixtureonto the peripheries of the thermally conductive substrate andparticularly onto the exposed surface of the lead frame was accelerated,so that the resin burrs and the surface stains were increased.Especially, it was confirmed that when the gel time at a temperature of155° C. of the thermally conductive resin sheet member at the stage ofthe thermally conductive resin sheet member attached to the lead framewas in the range between 20 seconds and 150 seconds, the filling extentinto the openings of the lead frame, the adhesion state of the leadframe and the adhesion state of the metal heat dissipation plate wereparticularly good, and also the formation of the surface stains and theresin burrs was slight.

Therefore, when the gel time of the thermally conductive resin sheetmember is in the above-mentioned range, particularly in the rangebetween 50 seconds and 90 seconds, very good thermally conductivesubstrates can be produced. Further, re-flow tests were carried out at amaximum temperature of 260° C. for ten seconds as reliability evaluationtests of thus produced substrates (having a gel time in the rangebetween 20 seconds and 120 seconds). After completion of such tests,there was nothing wrong at the interface between the thermallyconductive resin sheet member and the lead frame and the metal plate,which confirms that strong adhesions were maintained.

By varying the thickness of the spacer variously upon the production ofthe thermally conductive substrates as described above, variousthermally conductive substrates were produced of which thermallyconductive resin sheet members had various thicknesses. The thickness ofthe center portion of each thermally conductive substrate was measuredby a micrometer. A relationship between the thickness of the spacer andthe measured thickness of the substrate is shown in FIG. 9. As seen fromFIG. 9, the thickness, and thus an amount (size) of the thermallyconductive resin sheet member, can be accurately controlled by varyingthe thickness of the spacer, so that the thermally conductive substrateof which thickness and thus weight per single sheet is stable can beproduced.

Example 2

Using the thermosetting resin mixture having a composition which was thesame as that in Example 1, a thermally conductive resin sheet memberhaving a thickness of about 0.4 mm was produced on a PET film as inExample 1. Then, the thermally conductive resin sheet member wasthermally treated in a drying oven at a temperature of 100° C. so thatit had a gel time of 60 seconds.

Three sheets of such thermally conductive resin sheet member wereprepared, and the PET films were removed from two of the sheets. Thesheets were stacked as shown in FIG. 4( b) while the back surface of thethermally conductive resin sheet member was in contact with the frontsurface of the other thermally conductive resin sheet member, and a PETfilm was further placed on the uppermost surface. They were placed in amold which was able to press those sheets between a pair of platesheated to a temperature of 60° C. while keeping a predetermined gap,followed by pressing at a pressure of 5 MPa, so that an integratedthermally conductive resin sheet member having a controlled thicknesswas obtained as shown in FIG. 4( c). Thereafter, by stamping out asection into a predetermined size using a die, the thermally conductiveresin sheet member of which the amount (size) was controlled wasobtained as shown in FIG. 4( d).

Next, a circuit pattern was prepared by stamping it out from a 42-alloy(42% Ni—Fe alloy) plate having a thickness of 0.5 mm so that a leadframe was prepared which was plated with nickel as well as a solder. Onesurface of the lead frame was roughened in the same manner as in Example1.

The lead frame was thermally pressed with the thus-obtained thermallyconductive resin sheet member as shown in FIG. 2( b) at a temperature of65° C. and a pressure of 10 MPa for 60 seconds, whereby a thermallyconductive resin sheet member attached to the lead frame was obtained.It is noted that the PET film was attached to the surface of thethermally conductive resin sheet member.

Next, an aluminum plate having a thickness of 1 mm was prepared as aheat dissipation metal plate, and both surfaces thereof were subjectedto the sand blasting treatment as with the lead frame. Then, the releasefilm was removed from the thermally conductive resin sheet memberattaching lead frame obtained as described, the thermally conductiveresin sheet member attaching lead frame was overlapped with the aluminumplate such that the lead frame and the aluminum plate are opposed toeach other through the thermally conductive resin sheet member as shownin FIG. 7( b).

First, they were heated at a temperature of 140° C. for 15 secondsfollowed by pressing under a pressure of 14 MPa for 10 minutes, so thata thermally conductive substrate having a thickness of about 2.5 mm wasobtained as shown in FIG. 7( c). In addition, the thermally conductivesubstrate was subjected to the thermal treatment thereafter at atemperature of 175° C. for 6 hours, whereby a final thermally conductivesubstrate of which thermosetting resin was sufficiently cured wasobtained.

The adhesion states of the lead frame and the aluminum plate at theinterfaces of the obtained thermally conductive substrate were evaluatedby SAT, and no delamination was observed at the interfaces. Further, athermal cycling test between −55° C. and 125° C. was carried out for1000 cycles, after which the adhesion states at the interfaces wereevaluated, and no delamination was observed. It has been confirmed basedon these results that the thermally conductive substrate produced by theprocess according to the present invention has a high reliability.

Example 3

A thermally conductive resin sheet member which was used for thisExample was formed. First, a thermosetting resin mixture in a slurryform was prepared by mixing an inorganic filler and a thermosettingresin as well as the following components, of which compositions areshown below:

(1) Inorganic filler: Al₂O₃ (AS-40 having an average   88 parts byweight particle diameter size of 12 μm, manufactured by Showa Denko) (2)Thermosetting resin: epoxy resin (XNR5002, 11.5 parts by weightmanufactured by Nagase-CIBA Ltd.) (3) Other additives Silane basedcoupling agent (A-187, manufactured  0.3 parts by weight by NipponUnicar Co., Ltd.) Carbon black (manufactured by Toyo Carbon)  0.2 partsby weight

The above components were blended and a small amount of MEK was furtheradded thereto so as to reduce the viscosity, followed by kneading themusing a kneader (manufactured by Matsuo-Sangyo) and additionallykneading using a kneader having three rolls, and then by vacuum dryingso as to remove MEK so that a thermosetting resin mixture in a clay-likeform is obtained. The thermosetting resin mixture was extruded onto arelease film made of a polyethylene terephthalate (PET) which wassubjected to the release treatment so that a thermally conductive resinsheet member was obtained which had a thickness of 1.2 mm.

Thereafter, the obtained thermally conductive resin sheet member wasthermally treated in a drying oven at a temperature of 125° C. for 50minutes followed by cooling to room temperature so that a gel time ofthe thermally conductive resin sheet member was adjusted to 70 seconds.

Next, a lead frame was prepared by stamping it out of a copper platehaving a thickness of 0.8 mm so that the lead frame had a wiringpattern. The lead frame was stacked on the thus-obtained thermallyconductive resin sheet member (in this Example, only a single piecethereof) as shown in FIG. 5( b), which was pressed in a mold having ironplates under a pressure of 4 MPa which were able to approach each otherto form a predetermined gap between them and which were heated to atemperature of 50° C. Thus, a thermally conductive resin sheet memberwas obtained as shown in FIG. 5( c) of which thickness was controlledand which was integrated with the lead frame. Then, the thermallyconductive resin sheet member was formed into a predetermined shape asshown in FIG. 5( d) by cutting off unnecessary portions of the thermallyconductive resin sheet member while heating it to a temperature of 60°C.

Thereafter, a copper plate having a thickness of 3 mm was placed on theobtained thermally conductive resin sheet member attached to the leadframe, followed by heating them to a temperature of 140° C. for 15seconds without pressing and then by pressing with a pressure of 14 MPafor 10 minutes, whereby a thermally conductive substrate having athickness of 4.5 mm was obtained as shown in FIG. 7( c). Then, thethermally conductive substrate was thermally treated further at atemperature of 175° C. for 6 hours so that the cure of the thermosettingresin proceeded so as to complete the thermally conductive substrate.

Evaluations similar to those in Example 2 were carried out, andsubstantially the same results were obtained. It has been confirmed thatbased on these results, the thermally conductive substrate produced bythe process according to the present invention has a high reliability.

Example 4

Using a thermosetting resin mixture having the same composition as inExample 3, a thermally conductive resin sheet member having a thicknessof about 1.2 mm was prepared on a PET film in the same manner as inExample 1. Then, the thermally conductive resin sheet member wasthermally treated in the drying oven at a temperature of 125° C. so asto adjust the gel time thereof to 70 seconds.

An aluminum plate having a thickness of 1 mm was prepared as a heatdissipation metal plate and both surfaces thereof were subjected to theroughening treatment as in Example 1. Then, the heat dissipation metalplate was placed against the thus-obtained thermally conductive resinsheet member as shown in FIG. 8( b) followed by thermally pressing themat a temperature of 75° C. with a pressure of 10 MPa for 5 minutes. Theheating was carried out in a vacuum condition (having a pressure of1×10⁻⁴ MPa) so as to avoid formation of voids.

By doing so, a thermally conductive resin sheet attached to the aluminumplate as shown in FIG. 8( c) was obtained wherein the thermallyconductive resin sheet member was press bonded to the heat dissipationmetal plate. It is noted that the PET film was still attached to thesurface of the thermally conductive resin sheet member.

Next, a lead frame was prepared by etching a copper plate having athickness of 0.5 mm (manufactured by Kobe Steel) in a known technique soas to form a circuit pattern followed by nickel plating. Thereafter, onesurface of the lead frame was roughened in the same manner as in thecase of the aluminum plate.

The release film was removed from the thermally conductive resin sheetattached to the aluminum plate obtained as described above, and thealuminum plate and the lead frame were stacked and aligned through thethermally conductive resin sheet member as shown in FIG. 8( d), whichwere pressed with a pressure of 14 MPa at a temperature of 175° C. for10 minutes. By doing so, the thermally conductive resin sheet memberfilled the pattern gaps of the lead frame so as to form a single surfacetogether with the lead frame and also cured so that a thermallyconductive substrate having a thickness of 2.5 mm (a thickness of aninsulation layer is 1.0 mm) to which the heat dissipation metal platewas bonded was obtained as shown in FIG. 8( e).

Thereafter, the thermal treatment was further carried out at atemperature of 175° C. for 6 hours so as to allow the cure of thethermosetting resin to proceed, and the thermally conductive substratewas completed. The substrate thus produced had few resin burrs andsurface stains, and the visible and SAT observations showed nothingparticularly wrong as to the interface between the thermally conductiveresin sheet member and the lead frame or the heat dissipation metalplate, which confirmed that strong adhesion was achieved. Further, there-flow tests were carried out as a reliability test, and nothingparticularly wrong was observed.

On the other hand, as a comparative example, when a similar thermallyconductive resin sheet member which was not subjected to the thermaltreatment (i.e., without adjusting a gel time) was cured so as tointegrate with the aluminum plate, followed by integrating with the leadframe, curing of the thermally conductive resin sheet member wasinsufficient upon the thermally pressing for 10 minutes for the purposeof integrating with the lead frame, and it took at least 30 minutes forsufficient curing.

Therefore, it became possible to make a time period for the curing ofthe thermally conductive resin sheet member short by thermally treatinga plurality of the thermally conductive resin sheet members together soas to adjust their gel times beforehand which were appropriate for theproduction of the thermally conductive substrate, so that the production“Takt” of the thermally conductive substrate could be shortened.

As described above, due to the production of the thermally conductiveresin sheet member attached to the lead frame comprising the thermallyconductive resin sheet member, the lead frame and the heat dissipationmetal plate, the formation of the resin burrs and the surface stains dueto the exudation of the thermosetting resin mixture can be suppressed byusing the thermally conductive resin sheet member attaching lead frameaccording to the present invention. Also, due to the adjustment of thegel time prior to the production of the thermally conductive substrate,many thermally conductive resin sheet members can be thermally treatedtogether, which shortens a time period for curing the thermallyconductive resin sheet member carried out by means of heating it in alater step, so that it becomes possible to shorten the production “Takt”of the thermally conductive substrate and also to suppress the formationof the resin burrs and the surface stains on the surfaces of the leadframe and the metal heat dissipation plate. Further, it is possible toproduce the thermally conductive substrate having a stable thickness bypressing the thermally conductive resin sheet member of which gel timehas been controlled so as to have a uniform thickness and thus tocontrol an amount of the thermally conductive resin sheet member perunit area thereof.

In addition, the thermally conductive resin sheet member which has justbeen just (thus, before the adjustment of the gel time) still has a longgel time, so that such thermally conductive resin sheet member can bestored for an extended period. Since the gel time adjustment can becarried out as to many of the thermally conductive resin sheet memberstogether, the production “Takt” of the thermally conductive substrate isimproved overall so that the thermally conductive substrate having thegood heat dispassion and the high reliability can be produced.

It is noted that the thermally conductive substrate (which may bereferred to as “thermally conducting substrate”) is a substrate made ofa material which includes the filler for the purpose of the heatconduction as seen from the above description, and the thermallyconductive substrate usually has the wiring pattern on one surface ofthe substrate and the heat dissipation metal plate on the other surface.Further, the thermally conductive resin sheet member is a sheet formmember which is used for the production of such a thermally conductivesubstrate, and the thermally conductive resin sheet member is obtainedby curing a sheet material made of the thermosetting resin mixture.

1. A process of producing a thermally conductive resin sheet memberattaching lead frame which comprises a lead frame which is located onand which is integrated with a thermally conductive sheet member formedfrom a thermally conductive resin mixture comprising an in organicfiller and a thermosetting resin composition which member comprises athermosetting resin in a semi-cured state, the process comprising thesteps of: (a) obtaining the thermally conductive resin sheet member fromthe thermally conductive resin mixture comprising the inorganic fillerand the thermally conductive resin composition which comprises thethermosetting resin, (b) thermally treating the thermally conductiveresin sheet member so that it has a predetermined gel time, and (c)placing the lead frame on the thermally conductive resin sheet memberand pressing them toward each other under a temperature at which curingof the thermally conductive resin does not proceed so as to integratethe lead frame and the sheet member.
 2. The process of producing thelead frame according to claim 1 wherein the predetermined gel time is inthe range between 20 seconds and 120 seconds at a temperature of 155° C.3. The process of producing the lead frame according to claim 1 whereinthe lead frame includes a through opening, and the through opening isfilled with the thermally conductive resin sheet member in the step (c)so that the thermally conductive resin sheet member and the lead frameare integrated so as to form a flushed surface.
 4. The process ofproducing the lead frame according to claim 1 which comprises the stepof forming the thermally conductive resin sheet member into apredetermined shape after the step (b) and before the step (c).
 5. Theprocess of producing the lead frame according to claim 4 wherein thestep of forming the thermally conductive resin sheet member into thepredetermined shape comprises sandwiching the thermally conductive resinsheet member between a pair of plates and allowing the plates toapproach to each other so as to press the thermally conductive resinsheet member such that a predetermined spacing between the plates isachieved whereby the thermally conductive resin sheet member having apredetermined thickness is obtained, and then forming the thermallyconductive resin sheet member into the predetermined shape.
 6. Theprocess of producing the lead frame according to claim 1 which comprisesremoving a portion of the lead frame which has been integrated with thethermally conductive resin sheet member after the step (c).
 7. Theprocess of producing the lead frame according to claim 1 wherein in thestep (c), the thermally conductive resin sheet member and the lead frameare sandwiched between two plates, the plates are allowed to approach toeach other so that a spacing between them becomes as predetermined,whereby the thermally conductive resin sheet member and the lead frameare pressed toward each other so that the thermally conductive resinsheet member which is integrated with lead frame and which has apredetermined thickness is obtained, and the process further comprisesthe step (d) in which the thermally conductive resin sheet member whichhas been integrated with the lead frame is formed into a predeterminedshape.
 8. The process of producing the lead frame according to claim 7wherein the predetermined gel time is in the range between 20 secondsand 120 seconds at a temperature of 155° C.
 9. The process of producingthe lead frame according to claim 7 wherein the lead frame includes athrough opening, and the through opening is filled with the thermallyconductive resin sheet member in the step (c) so that the thermallyconductive resin sheet member and the lead frame are integrated so as toform a flushed surface.
 10. The process of producing the lead frameaccording to claim 7 which comprises removing a portion of the leadframe which has been integrated with the thermally conductive resinsheet member after the step (d).